SCANNER OPTICS

f-theta Scanner Lenses
Telecentric f-theta Scanning Lenses
Scanner Mirrors
Optimized & Industry-ready Solutions

Scanner Lenses to your specifications

ULO Optics, the market leader in scanning lens technology for almost three decades, offers the widest range of singlet, double and triple f-theta lenses available on the market. Being the first to make these lenses commercially available, ULO developed what is now considered to be the industry standard, the 48TSL series. These lenses are often used with our CO2mpact Range of beam expanders (C-BE Series).

All scanner optics can be coated to your specifications, or are available from stock with our Supermax or UltraLO coatings for superior performance.

Dimensional Tolerances

Dimensional tolerances for standard lenses, windows and mirrors are as follows:

  • Diameter: +0/-0.1 mm for most diameters, +0/-0.05 mm for 1.5″ lenses
  • Centre thickness: +/-0.1 mm
  • Edge thickness variation: most lenses within 0.03 mm and some within 0.05 mm
  • Focal length: +/-0.5%. Some long focal singlet scanning lenses can be 1 to 2% due to highly meniscus shape
  • Surface form: typically less than 1 visible fringe on a 38 mm diameter test area
  • Surface roughness: within 20 Å rms

Tighter tolerances are possible on custom optics. Sometimes they are interrelated if very tight, e.g. the achievable flatness on a window can depend on the thickness (rigidity).

f-theta Scanner Lenses

ULO Optics’ ZnSe singlet scanning lenses, the TSL series, are optimised to minimise the off-axis aberrations.

 

  • best compromise for all aberrations, field flatness and F-theta error using a single-element, spherical surface lens
  • for beams up to 15mm full diameter
  • focal length from 75mm to over 2122 mm
  • covering field sizes from 50mm to 1500mm square
  • use extends over many engraving, marking and cutting applications
  • designed to be positioned at the same location relative to the scanning mirrors, so are directly replaceable with another focal length
  • also available mounted
  • available with a number of different coatings for different wavelengths

Standard singlet f-Theta scanning lenses for a 15 mm diameter beam:

    
Part NumberField SizeFocal LengthSpot diameter (s.d.)*
48TSL7550 mm75 mm171 (49) micron
48TSL10070 mm100 mm181 (41) micron
48TSL150105 mm150 mm219 (32) micron
48TSL200140 mm200 mm269 (28) micron
48TSL250175 mm250 mm320 (23) micron
48TSL300210 mm300 mm373 (20) micron
48TSL360250 mm360 mm445 (16) micron
48TSL400280 mm400 mm481 (15) micron
48TSL435300 mm435 mm525 (15) micron
48TSL720500 mm720 mm850 (9) micron
48TSL1150840 mm1150 mm1390 (6) micron
48TSL1285900 mm1285 mm1520 (7) micron
48TSL21221500 mm2122 mm2480 (3) micron

s.d.* = Standard deviation

Spot diameter is determined from optical computation and are not measured values from marking or engraving. The width of an engraved line is affected by laser power, material, scan speed, etc and is normally less than the values listed here.

Should smaller spot sizes be required for the same focusing lens, we recommend the use of multi-element lenses, or of our larger diamter singlets (Please call for more info on the larger diameter singlets).

Please note that this page is only a representation of our most commonly used replacement f-Theta singlet lenses and is not our entire product line. If there is an item not listed or you have questions, please feel free to contact us and we will be more than happy to assist you.

Telecentric f-theta Scanner Lenses

Telecentric scanning lenses are a special configuration in which the arrangement of optics are designed to focus the beam such that it is always perpendicular to the flat field. This is especially important for drilling applications such as via hole drilling in printed circuit boards, ensuring that the drilled holes are perpendicular to the surface even off the center of the scanning field. Welding and structuring applications can also benefit from the use of a telecentric lens, as the spot remains round, even along the edges of the field.

Telecentric scanning lenses are always multi-element designs and are supplied in a housing. At least one lens element will be larger than the field size to be scanned. In practice, this means that for reasons of manufacture and cost that only small field sizes are possible, in turn implying short focal lengths. Each specific application demands custom solutions for these lens types. Contact us with your specifications for a preliminary design and we will quote you.

 

  • Made to custom requirements.
  • Advanced in-house design, based on years of innovation in the field
  • Perpendicular beam for critical applications

Singlet f-theta Scanning Lenses

ULO Optics’ ZnSe singlet scanning lenses, the TSL series, are optimised to minimise the off-axis aberrations.

 

  • best compromise for all aberrations, field flatness and F-theta error using a single-element, spherical surface lens
  • for beams up to 15mm full diameter
  • focal length from 75mm to over 2122 mm
  • covering field sizes from 50mm to 1500mm square
  • use extends over many engraving, marking and cutting applications
  • designed to be positioned at the same location relative to the scanning mirrors, so are directly replaceable with another focal length
  • also available mounted
  • available with a number of different coatings for different wavelengths

Standard singlet f-Theta scanning lenses for a 15 mm diameter beam:

    
Part NumberField SizeFocal LengthSpot diameter (s.d.)*
48TSL7550 mm75 mm171 (49) micron
48TSL10070 mm100 mm181 (41) micron
48TSL150105 mm150 mm219 (32) micron
48TSL200140 mm200 mm269 (28) micron
48TSL250175 mm250 mm320 (23) micron
48TSL300210 mm300 mm373 (20) micron
48TSL360250 mm360 mm445 (16) micron
48TSL400280 mm400 mm481 (15) micron
48TSL435300 mm435 mm525 (15) micron
48TSL720500 mm720 mm850 (9) micron
48TSL1150840 mm1150 mm1390 (6) micron
48TSL1285900 mm1285 mm1520 (7) micron
48TSL21221500 mm2122 mm2480 (3) micron

s.d.* = Standard deviation

Spot diameter is determined from optical computation and are not measured values from marking or engraving. The width of an engraved line is affected by laser power, material, scan speed, etc and is normally less than the values listed here.

Should smaller spot sizes be required for the same focusing lens, we recommend the use of multi-element lenses, or of our larger diamter singlets (Please call for more info on the larger diameter singlets).

Please note that this page is only a representation of our most commonly used replacement f-Theta singlet lenses and is not our entire product line. If there is an item not listed or you have questions, please feel free to contact us and we will be more than happy to assist you.

Multi-element f-theta Scanning Lenses

ULO Optics’ multi-element f-Theta lenses are designed for superior performance for working distances between 75 and 300 mm and field sizes up to 210 x 210 mm, for high power laser applications like marking, welding and structuring. The ZnSe lenses are highly transmissive and are mounted in an aluminum housing for easy handling. A protective window can be included and is recommended for short working distances. Our lenses are available with different coatings as needed.

 Doublets, the ZSD-15-Series

The ZSD-15 series doublets contain ZnSe elements made from the same laser grade ZnSe and fully coated with low absorption anti-reflection coatings. They are capable of handling high powers while focusing down to smaller spots.

 The ZnSe-Triplets, ZST-15-75 and ZST-15-100

  • focal lengths 75 and 100mm respectively, where higher performance than the doublets is required
  • the 75mm focal length lens is also nearly telecentric (see below) with the focused beam less than 5° to the normal
  • diffraction limited performance over the entire image plane
  • can be fitted with a protective window

Specifications

Part NumberField SizeFocal LengthSpot Diameter (s.d.)*
ZSD-15-7550 mm75 mm118 (25) micron
ZSD-15-10070 mm100 mm139 (22) micron
ZSD-15-150105 mm150 mm171 (0)
ZSD-15-200140 mm200 mm225 (0) micron
ZSD-15-250175 mm250 mm282 (0) micron
ZSD-15-300210 mm300 mm338 (0) micron
ZST-15-7550 mm75 mm89 (4) micron
ZST-15-10070 mm100 mm113 (1) micron

s.d.* = Standard deviation

Spot diameter is determined from optical computation and are not measured values from marking or engraving. The width of an engraved line is affected by laser power, material, scan speed, etc and is normally less than the values listed here.

Please note that this page is only a representation of our most commonly used replacement f-Theta multi-element lenses and is not our entire product line. If there is an item not listed or you have questions, please feel free to contact us and we will be more than happy to assist you.

Scanner Mirrors

ULO Optics offers the LSM series of monocrystalline silicon mirrors for use in galvo based scan heads. The mirrors are designed for the use with high power lasers, and are sized to accomodate up to 30 degrees of deflection. The thickness is optimized to provide low mass while minimizing distortion at high scanning speeds. Please contact us with your specifications so we can supply you with a quotation for your specific requirements.

 

  • Low weight for faster scanning speed
  • Extremely durable, passes MIL-C-48497A severe abrasion test
  • Phase retardation minimised
  • Custom mirrors available to your specifications

Contact us today!